Theoretical Analysis of Silicon-Based Integrated-Optic Mach-Zehnder Pressure Sensors |
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Authors: | B. -H. V. Borges S. K. Manfrin M. A. Romero A. C. C sar |
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Affiliation: | B. -H. V. Borges ,S. K. Manfrin,M. A. Romero,A. C. Cé,sar |
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Abstract: | Silicon-based Mach-Zehnder integrated-optic pressure sensors are investigated in this article. Several structures proposed in the literature are examined and performance parameters such as power leakage towards the Si substrate, radiation loss as a function of the Y-junction aperture angle, and halfwave pressure are analyzed. Modeling of the material deformation characteristics and refractive index change as a function of the applied pressure is carried out by using the finite-difference technique. The sensor optical characteristics and waveguiding properties are computed by using the finite-difference beam-propagation method (FD-BPM) and the extended effective index method (EEIM). Guidelines for performance optimization are proposed. |
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Keywords: | Optical Sensors Optical Waveguides Silicon Integrated Optics Mach-ZEHNDER Interferometer |
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