| 软X射线多层膜分束镜的研制 |
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| 引用本文： | 易葵,邵建达,范正修,袁利祥.软X射线多层膜分束镜的研制[J].光学学报,1999,19(3):98-401. |
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| 作者姓名： | 易葵 邵建达 范正修 袁利祥 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 介绍了软件Ｘ射线多层膜分束镜的制备，采用蚀基底法和氯化钠脱膜分离法制备且获得了大面积的Ｍｏ／Ｓｉ多层膜分束镜。
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| 关 键 词： | 软X射线多层膜 分束镜 腐蚀 脱膜 |
| 收稿时间： | 1997/11/6 |
Study of Soft X-Ray Multilayer Beamsplitters |
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| Yi Kui,Shao Jianda,Fan Zhengxiu,Yuan Lixiang.Study of Soft X-Ray Multilayer Beamsplitters[J].Acta Optica Sinica,1999,19(3):98-401. |
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| Authors: | Yi Kui Shao Jianda Fan Zhengxiu Yuan Lixiang |
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| Abstract: | The design and testing of the soft X ray multilayer beam splitters are presented. The beam splitters of Mo/Si multilayer with a large area by etching substrate and separating multilayer from substrate with NaCl coating are fabricated. |
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| Keywords: | soft X ray multilayer beam splitter etch separate |
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