New developments in the surface analysis of solids |
| |
Authors: | A Benninghoven |
| |
Institution: | (1) I. Physikalisches Institut der Universit?t zu K?ln, Universit?tsstra?e 14, D-5000 K?ln 41, F.R. Germany |
| |
Abstract: | In both fundamental and applied surface physics, it is essential to know as much as possible about the chemical composition
of the outer atomic layers of solids. Rapid progress has recently been made in the development of analytical methods which
could be used in surface analysis. All utilize some type of emission (photons, electrons, atoms, molecules, ions), caused
by excitation of the surface states. Both the “excitation” and emission processes must meet certain basic requirements as
regards information depth, form in which the information is obtained, sensitivity, changes in the surface layer during analysis,
etc. The more important of the methods that qualify, namely Auger-Electron Spectroscopy (AES), photo-Electron Spectroscopy
for Chemical Analysis (ESCA) and the static method of Secondary-Ion Mass Spectrometry (SIMS), are discussed and their potentialities
and limitations illustrated by characteristic examples. |
| |
Keywords: | Surface analysis Auger ESCA SIMS |
本文献已被 SpringerLink 等数据库收录! |
|