a P.N. Lebedev Physical Institute, 53 Leninsky Prospekt, Moscow 119991, Russia
b Kharkov Polytechnical Institute, 21 Frunze Street, Kharkov 310002, Ukraine
Abstract:
Fabrication, calculation and optical properties of gratings fabricated by bevel cutting multilayer structures are discussed. Such gratings have very short period (about 100 nm) and provide high angular dispersion as compared to ruled, holographic or multilayer coated gratings without reduction of diffraction efficiency. Using graded multilayers it is possible to produce sliced multilayer gratings (SMG) with graded period (GSMG), which can focus radiation in one direction. Examples of SMG for various wavelengths in the interval 2–20 nm are considered.