Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering |
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Authors: | Wang Xue-Jin Liang Chun-Jun Guan Kang-Ping Li De-Hu Nie Yu-Xin Zhu Shi-Oiu Huang Feng Zhang Wei-Wei and Cheng Zheng-Wei |
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Institution: | [1]College of Science, China AgriculturM University, Beijing 100083, China; [2]School of Science, Beijing Jiaotong University, Beijing 100044, China; [3]Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China |
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Abstract: | This paper reports that the thermochromic vanadium dioxide films
were deposited on various transparent substrates by radio frequency
magnetron sputtering, and then aged under circumstance for years.
Samples were characterized with several different techniques such as
x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when
they were fresh from sputter chamber and aged after years,
respectively, in order to determine their structure and composition.
It finds that a small amount of sodium occurred on the surface of
vanadium dioxide films, which was probably due to sodium ion
diffusion from soda-lime glass when sputtering was performed at high
substrate temperature. It also finds that aging for years
significantly affected the nonstoichiometry of vanadium dioxide
films, thus inducing much change in Raman modes. |
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Keywords: | surface oxidation vanadium
dioxide films magnetron sputtering |
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