Thermodynamics of Silicon Nitride. Standard molar enthalpy of formation of amorphous Si3N4 at 298.15 K

The standard molar enthalpy of formation Δ_f H _m ⁰=–760±12 kJ for amorphous silicon nitride a-Si₃N₄ has been determined from fluorine combustion calorimetry measurements of the massic energy of the reaction: a-Si₃N₄(s)+6F₂(g)=3SiF₄(g)+2N₂(g). This value combined with Δ_f H _m ⁰= –828.9±3.4 kJ for a-Si₃N₄ indicates that determined for the first time molar enthalpy change for the transition from amorphous to α-crystalline form Δ_trs H _m ⁰=69±13 kJ is very evident, in spite of its large uncertainty range resulting from impurity corrections. This revised version was published online in July 2006 with corrections to the Cover Date.