| 非尖锐界面多层膜对软X光衍射研究 |
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| 引用本文： | 冯仕猛,易葵,赵强,汤兆胜,范正修.非尖锐界面多层膜对软X光衍射研究[J].光子学报,1999,28(6):546-550. |
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| 作者姓名： | 冯仕猛 易葵 赵强 汤兆胜 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所!上海市800－211信箱，201800，中国科学院上海光学精密机械研究所!上海市800－211信箱，201800，中国科学院上海光学精密机械研究所!上海市800－211信箱，201800，中国科学院上海光学精密机械研究所!上海市800－211信箱，201800，中国科学院上海光学 |
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| 摘 要： | 本文研究超薄膜情况下,提出一个新物理模型,研究膜系内密度呈周期性连续变化时X射线正入射衍射强度理论计算,并由此得到水窗波段超薄膜设计参数,与用光学常数得到的参数非常一致。理论上推出一个质量密度呈余弦变化的多层膜仍然有高的软X光反射率。
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| 关 键 词： | 软X光衍射 反射强度 质量密度 周期 |
| 收稿时间： | 1999-03-22 |
| 修稿时间： | 1999-03-22 |
X-RAY-DIFFRACTION THEORY OF MULTILAYER WITH NO SHARP INTERFACE |
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| Feng Shimeng, Yi Kui, Zhao Qiang,Tang Zhaosheng, Fan Zhengxiu.X-RAY-DIFFRACTION THEORY OF MULTILAYER WITH NO SHARP INTERFACE[J].Acta Photonica Sinica,1999,28(6):546-550. |
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| Authors: | Feng Shimeng Yi Kui Zhao Qiang Tang Zhaosheng Fan Zhengxiu |
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| Institution: | Feng Shimeng
(Shanghai Institute of Optics and Fine Mechanics,Academy Science of China
Box:800-211,Shanghai 201800)
Yi Kui
(Shanghai Institute of Optics and Fine Mechanics,Academy Science of China
Box:800-211,Shanghai 201800)
Zhao Qiang
(Shanghai Institute of Optics and Fine Mechanics,Academy Science of China
Box:800-211,Shanghai 201800)
Tang Zhaosheng
(Shanghai Institute of Optics and Fine Mechanics,Academy Science of China
Box:800-211,Shanghai 201800)
Fan Zhengxiu
(Shanghai Institute of Optics and Fine Mechanics,Academy Science of China
Box:800-211,Shanghai 201800) |
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| Abstract: | When the quality density of multilayer continuously periodically vary under the super thin film,it is presented the simple physical model for calculating the diffraction intensity of multilayer.The designed parameter of the reflector for the water window X-ray was obtained from it,and was the same as the parameter obtained from the optical analysis.The theory show that the multilayer has still high reflectance of soft X-ray when the quality density of multilayer periodically vary on the formula:ρ＝ρ0+ρcoskx. |
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| Keywords: | Soft X-ray diffraction Reflected intensity Quality intensity Period |
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