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Characterisation of BaxSr1−xTiO3 films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction |
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| Authors: | P. Petrik,N.Q. Khá nhZ.E. Horvá th,Z. ZolnaiI. Bá rsony,T. LohnerM. Fried,J. GyulaiC. Schmidt,C. SchneiderH. Ryssel |
| Affiliation: | a MFA, Research Institute for Technical Physics and Materials Science, P.O. Box 49, 1125 Budapest, Hungary b Fraunhofer-Institut für Integrierte Schaltungen, Schottkystrasse 10, 91058 Erlangen, Germany c Lehrstuhl für Elektronische Bauelemente, Friedrich-Alexander Universität Erlangen-Nürnberg, Cauerstrasse 6, 91058 Erlangen, Germany |
| Abstract: | |
| Keywords: | E280 R190 D180 C185 |
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