| 一个干涉图法波面位相自动探测 |
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| 引用本文： | 王文生.一个干涉图法波面位相自动探测[J].半导体光电,1997,18(3):179-182. |
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| 作者姓名： | 王文生 |
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| 作者单位： | 长春光学精密机械学院 |
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| 摘 要： | 用Ｈｅ－Ｎｅ激光器作光源、ＣＣＤ摄像机－微机系统作探测器，应用一个干涉图法在泰曼干涉仪上实现了自动计算干涉图，不但再现了二维等高线图，而且获得了三维波面面形，作为实例，测试了玻璃平板的不平行度。
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| 关 键 词： | 泰曼干涉仪 干涉图 CCD摄像机 电荷耦合器件 |
Automatic measurement on wave front phase by one interferogram method |
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| WANG Wensheng.Automatic measurement on wave front phase by one interferogram method[J].Semiconductor Optoelectronics,1997,18(3):179-182. |
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| Authors: | WANG Wensheng |
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| Abstract: | An automatic calculation interferogram is realized on Twyman inter- ferometer by one interferogram method using He Ne laser as a light source and CCD camera-computer system as a detectors.As a result,not only two dimensional contour line map is reconstructed,but also three dimensional wave front is obtained.As an example,the unparallelism of a glass plate is measured. |
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| Keywords: | Twyman Interferometer Interferogram CCD Camera Characteristic Measurement |
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