Processing and characterization of Pb(Mg,Nb)O3-PbTiO3 thin films from metal alkoxide-derived gels

The sol-gel processing is one of promising methods to fabricate well-derived integrated thin films at relatively low temperature. Ferroelectric niobates films do afford the possibilities for adding the values by the hybridization with semiconductor and/or electro-optic systems. The molecular level designing of the precursor solution was stressed as well as the control of key processing factors. The advantages of this sol-gel have been extended to prepare the ferroelectric Pb(Mg, Nb)O₃-PbTiO₃ solid solution films integrated on Si wafers. The crystallization of the films with desired crystal structure could be promoted by the controlled partial hydrolysis of designed alkoxide solution in the intermediate state and the pre-heated treatment of alkoxide-derived films in flow of water vapor and oxygen gas mixture.