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Performing probe experiments in the SEM
Authors:Peng L-M  Chen Q  Liang X L  Gao S  Wang J Y  Kleindiek S  Tai S W
Institution:Department of Electronics, Peking University, Beijing 100871, China. plm@ele.pku.edu.cn
Abstract:A four nanoprobe system has been installed inside a FEI XL30 F scanning electron microscope (SEM), and shown to be fully compatible with the normal functions of the SEM and also a Gatan cold stage (model C1003, -185-400 degrees C). With some selected examples of applications, we have shown that this nanoprobe system may be used effectively for gripping, moving and manipulating nanoobjects, e.g. carbon nanotubes, setting up electric contacts for electronic measurements, tailoring the structure of the nanoobject by cutting, etc. and even for making unexpected nanostructures, e.g. a nanohook. Applications in other areas have also been speculated, limitations or disadvantages of the current design of the probe system were discussed, and methods for possible improvement were suggested.
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