The determination of local structural units in amorphous SiBN3C by means of X-ray photoelectron and X-ray absorption spectroscopy |
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| Authors: | R. Franke St. Bender I. Arzberger J. Hormes M. Jansen H. Jüngermann J. Löffelholz |
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| Affiliation: | 1. Physikalisches Institut, Universit?t Bonn, Nu?allee 12, D-53115, Bonn, Germany
2. Anorganisch-Chemisches Institut, Universit?t Bonn, Gerhard-Domagk-Strasse 1, D-53121, Bonn, Germany
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| Abstract: | X-ray photoelectron spectroscopy (XPS) and X-ray absorption near edge structure (XANES) spectroscopy at the K-edge of Si, N, and B are presented as techniques suited to determine structural units in amorphous SiBN(3)C. The measurements reported give evidence for the presence of tetrahedral (SiN(4))- and planar (BN(3))-groups. It is concluded that these structural elements dominate the atomic surroundings of B and Si, respectively. From the spectroscopic results we conclude that C is mainly bonded to N and is not present as a pure carbide. |
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