Chromatically dispersed interferometry with wavelet analysis |
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Authors: | Papastathopoulos Evangelos Körner Klaus Osten Wolfgang |
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Institution: | Institut für Technische Optik, Universit?t Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. papastav@ito-uni-stuttgart.de |
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Abstract: | A new white-light interferometry point sensor utilizing a chromatically dispersed depth detection field is addressed. Monitoring the interference in the optical frequency domain allows for microscopic height detection without the necessity of a mechanical axial scan. The problem of limited dynamic range in previously reported spectral interferometric schemes is solved by forming a high-contrast interference window due to the chromatically dispersed focusing of the detection field. In a proof-of-principle experiment, the position of a reflecting object could be retrieved with a focus of 0.8 NA over an axial range of 30 microm by analyzing the phase of the emerging interference wavelets. |
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