Grazing incidence X-ray diffraction analysis of surface modified SiC layers |
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Authors: | J Neuhäuser G Treffer H Plänitz W Wagner G Marx |
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Institution: | (1) Technical University Chemnitz-Zwickau, Dept. of Chemistry, D-09107 Chemnitz, Germany, DE |
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Abstract: | Thin films of silicon carbide with codeposited elemental silicon were prepared by chemical vapor deposition (CVD). In a second
CVD-process a thin titanium layer was deposited on the SiC(Si) basic layer. The solid state reaction between titanium and
the codeposited silicon can be observed by X-ray diffractometry. A helpful analytical method for the observation of the growth
of the reaction products is grazing incidence X-ray diffractometry. Various diffraction patterns of titanium silicides can
be obtained by decreasing incidence angles.
Received: 24 June 1996 / Accepted: 5 December 1996 |
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