Role of the dislocation screw component in the formation of the dislocation structure in Ge- and Si-based semiconductor heterosystems

The possibility of solving the problem of propagating dislocations in heterosystems by means of decreasing the number of dislocation families participating in the process of misfit stress relief has been investigated. The system of Γ-shaped misfit dislocations, which is proposed in the literature as the optimal type of plastic relaxation, has been analyzed. Taking into account the effect of the screw dislocation component, this suggestion is valid only for the initial stage of relaxation. The results of simulation of the process of plastic relaxation and experimental investigations of structures containing L-shaped dislocations are presented. Misfit stress relief in heterostructures grown on vicinal substrates has been theoretically and experimentally investigated.