| 生长温度、过冷度对InAsPSb外延层表面形貌影响的研究 |
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| 引用本文： | 王永珍 金长春. 生长温度、过冷度对InAsPSb外延层表面形貌影响的研究[J]. 发光学报, 1996, 17(1): 47-51 |
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| 作者姓名： | 王永珍 金长春 |
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| 作者单位： | 中国科学院长春物理研究所, 长春130021 |
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| 摘 要： | 本文采用恒温液相外延生长方法,研究了InAsPSb四元材料外延层表面形貌与生长温度、过冷度之间的关系.实验结果表明,生长温度、过冷度对外延晶体质量及表面形貌的影响较为明显,同时对其它因素的影响也做了分析.
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| 关 键 词： | 生长温度 过冷度 InAsPSb 表面形貌 |
| 收稿时间： | 1995-04-06 |
INFLUENCE OF GROWTH AND SUPERCOOLING TEMPERATURE ON THE SURFACE MORPHOLOGY OF InAsPSb EPITAXIAL LAYER |
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| Wang Yongzhen, Jin Changchun, Lu Guijin. INFLUENCE OF GROWTH AND SUPERCOOLING TEMPERATURE ON THE SURFACE MORPHOLOGY OF InAsPSb EPITAXIAL LAYER[J]. Chinese Journal of Luminescence, 1996, 17(1): 47-51 |
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| Authors: | Wang Yongzhen Jin Changchun Lu Guijin |
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| Affiliation: | Changchun Institute of Physics. Chinese Academy of Sciences. Changchun 130021 |
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| Abstract: | The growth of quaternary InAsPSb epitaxial layers DH using the constant temperature LPE method is reported in this paper. The variation of the epitaxial surface morphology under different conditions,the effect of growth condition on the properties of epilayers,and defects of epilayers produced in growth process have been researched. Thegrowth morphology and characteritics are analyzed. The results show that surface and properties of epitaxy were controlled by changing the growth and supercooling temperature. |
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| Keywords: | growth temperature supercooling temperature InAsPSb surface morphology |
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