MOCVD技术制备的ZnS:Mn电致发光薄膜结晶性及Mn2+分布

本文报导了用MOCVD技术制备的ZnS:Mn电致发光薄膜为立方晶相,结晶取向性好,颗粒大。从高倍率的扫描电镜拍摄的照片观察到薄膜的表面平滑。SIMS测量表明Mn2+在ZnS薄膜纵向分布均匀,但在两侧有起伏,可能的原因是在生长的初终阶段流量的突变使化合物的化学计量比偏离而产生位错,引起原子的局部堆积,并且由于初终阶段ZnS:Mn生长的衬底不同使原子堆积层厚度不同。

CRYSTALLINITY AND Mn2+ DISTRIBUTION OF ZnS:Mn ELECTROLUMINESCENT THIN FILM PREPARED BY MOCVD

ZnS:Mn electroluminescent thin films were prepared by metal organic chemical vapour deposition(MOCVD)technology.ZnS:Mn thin films are cubic crystal phase.Crystal directions are identical and grains are bigger.The average size of ZnS:Mn grains is 150.7 nm.The micro-surface of the thin film is smooth.(100)main peak of hexagonal crystal phase has not been found on ZnS:Mn X-ray diffraction spectrum.So it is elimined that ZnS: Mn thin film prepared by MOCVD may be hexagonal crystal phase.Mn2+ ions are uniform distributed in the thin film except for the edges. In which the content of Zn2+ and Mn2+ ions are higher.Possible reason is that the ions are piled up on dislocation,which is produced on edge areas during the initial and the final growth stage.In addition,the amount of the piled Zn2+,Mn2+ ions on the initial growth stage are more than ones on the final growth stage as a result of effection of the substrates and variability of stoichiometry.The piled layers are not beneficial to electroluminescence of ZnS:Mn thin film.It should be diminished by optimum experimental conditions.