XPS investigation of preferential sputtering of S from MoS2 and determination of MoSx stoichiometry from Mo and S peak positions

The preferential sputtering of S from bulk MoS₂ standard samples exposed to 3 keV Ar⁺ ion bombardment has been studied by XPS. The MoS_x stoichiometry decreases from MoS₂ to MoS_1.12 with a concomitant reduction in the Mo 3d_5/2 binding energy from 229.25 to 228.35 eV. The altered layer extends to a depth of 3.8 nm and is proposed to consist of a single amorphous MoS_x phase in which Mo has a varying number of nearest neighbour S atoms. Using peak positions alone it is possible to determine the MoS_x stoichiometry to an accuracy of x±0.1 from a plot of MoS_x stoichiometry against (Mo 3d_5/2–S 2p_3/2) binding energy. The results are of strong current interest for coating analysis applications as MoS₂ is a compound capable of providing low friction properties when incorporated into hard coatings.