The structure and mechanical properties of thick rutile-TiO2 films using different coating treatments

The hardness and Young's modulus of thick rutile-TiO₂ films were determined using a continuous stiffness measurement (CSM) technique in this study. Pure rutile-TiO₂ nanopowders (TH₂O, TFeSO₄ and TCuSO₄) were prepared using a modified homogeneous-precipitation process at low temperature (MHPPLT) method. The TiO₂ films were prepared from sols using 3% (w/w) of the prepared-TiO₂ suspension solution coated onto silicon wafers. After dip-coating was completed, the coatings were further treated by natural air-drying, water-vapor exposure, and calcination, respectively. An ellipsometry with a monochromator was used to measure the thickness and refractive index of the TiO₂ films, and a scanning electron microscopy (SEM) to determine their morphology. Three coatings of TH₂O, TFeSO₄ and TCuSO₄ demonstrated their refractive indexes of around 1.60 under three treatments. Volumetric expansion and thickness of the coatings should influence their refractive index. Furthermore, the continuous stiffness measurement (CSM) technique was used to perform nanoindentation testing on the hardness and Young's modulus of prepared rutile-TiO₂ coatings. The mean hardness and Young's modulus of three coatings increased with preparation temperature. In addition, the TH₂O coatings demonstrated greater hardness and modulus than those of TFeSO₄ and TCuSO₄ coatings in the natural air-drying condition. Surface cracking observed on the calcinated TFeSO₄ should be the reason why an obvious decrease of the mean hardness and Young's modulus appeared. Finally, two mechanical properties and related nanoindentation depth of the coatings were discussed in detail.