The structure of strained perovskite KTaO(3) thin films prepared by pulsed laser deposition |
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| Authors: | Janne Narkilahti Marina Tyunina |
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| Institution: | Microelectronics and Materials Physics Laboratories, University of Oulu, POB 4500, FI-90014 Oulun Yliopisto, Finland. janne.narkilahti@oulu.fi |
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| Abstract: | Epitaxial perovskite potassium tantalate (KTaO(3)) films with thicknesses of 7.4-36?nm are grown on SrTiO(3)(001) substrates by pulsed laser deposition. X-ray diffraction (XRD) analysis reveals evolution of lattice strain with increasing film thickness. A biaxial compressive in-plane strain as large as -?2.1% is obtained in the 7.4?nm-thick film. A bi-layer microstructure is detected in the 18?nm-thick film, suggesting the possibility for an abrupt strain relaxation. |
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