Investigation of nanoscale element distributions at surfaces with grazing incidence X‐ray spectroscopy techniques – an instrumentation study

Grazing incidence X‐ray methods are well‐established in the characterization of nanostructures at interfaces and surfaces. The purpose of the experiments reviewed in this work is the comparative characterization of different instrumentation concepts for grazing incidence X‐ray fluorescence analyses. Fluorescence scans recorded with a total reflection X‐ray fluorescence spectrometer featuring a variable angle of incidence are compared with data obtained with synchrotron radiation. The conclusions to the element distribution profiles, which are drawn from fluorescence scans carried out with the respective instrument, are compared. This way, the suitability of the total reflection X‐ray fluorescence spectrometer to complement synchrotron radiation facilities and the possibility to transfer surface and interface analyses from the synchrotron to the laboratory are assessed. The structures investigated include an Au on Si surfaces in the form of layers and particles, submicrometer‐sized droplets, a liquid film, and ions implanted into a Si wafer. Copyright © 2014 John Wiley & Sons, Ltd.