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| 基于扫描白光干涉法的表面三维轮廓仪 | |
| 引用本文： | 何永辉,蒋剑峰,赵万生. 基于扫描白光干涉法的表面三维轮廓仪[J]. 光学技术, 2001, 27(2): 150-152 |
| 作者姓名： | 何永辉 蒋剑峰 赵万生 |
| 作者单位： | 1. 上海宝钢股份有限公司 研究院设备所, 2. 上海交通大学 电子信息学院, 3. 哈尔滨工业大学 特种加工研究所, |
| 摘 要： | 在强调表面三维形貌测量重要性的基础上 ,介绍了利用扫描白光干涉法测量表面三维微观形貌的原理及三维轮廓仪测量系统的构成。通过给出的几个测量实例 ,反映了该三维轮廓仪的主要特点 ,适合于大范围、高精度、阶梯面的测量。最后分析了影响其测量精度的主要因素。 |
| 关 键 词： | 表面三维微观形貌测量 白光干涉 扫描白光干涉法 三维轮廓仪 |
| 文章编号： | 1002-1582(2001)02-0150-03 |
| 修稿时间： | 2000-06-26 |
Surface 3D profiler based on scanning white light interferometry method |
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| HE Yong-hui,JIANG Jian-feng,ZHAO Wan-sheng. Surface 3D profiler based on scanning white light interferometry method[J]. Optical Technique, 2001, 27(2): 150-152 | |
| Authors: | HE Yong-hui JIANG Jian-feng ZHAO Wan-sheng |
| Abstract: | On the base of emphasizing the importance of surface 3D topography measurement, this paper introduces the principle of scanning white light interferometry method and presents the constitution of surface 3D profiler's measuring system Next, several measuring examples are presented to explain the main characteristics of the profiler, namely, adapting to the measurement of large scale, high precision and discontinuous surface Finally, the main factors which influence the precision are analyzed |
| Keywords: | surface 3D micro topography measurement white light interference scanning white light interferometry 3D profiler |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |