氯硅烷的气相色谱分析

采用涂邻苯二甲酸二乙酯的气相色谱柱对用化学气相沉积法制备ＳｉＣ纤维的主要原料——氯硅烷直接进样分析，在较短的时间内即可得知每批原料的差异。实验表明，方法操作简便、快速，重复性和精密度较好，重复６次的变异系数均＜１％。可用于ＳｉＣ纤维原料的质量监测。

Determination of Chlorosilanes by Gas Chromatography

Chlorosilanes are the essential raw material of SiC fibre made by "CVD (chemical vapour deposition)" method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support (60-80 mesh), 3m x 5mm i.d. stainless-steel column; column temp., 60 degrees C; injection temp., 110 degrees C; thermal conductivity detector temp., 140 degrees C carrier gas H2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility. The coefficient of variation of the method was less than 1% (n = 6).