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Fundamental studies on a planar-cathode direct current glow discharge. Part I: characterization via laser scattering techniques
Institution:1. Rzhanov Institute of Semiconductor Physics SBRAS, 13 Lavrentiev aven., 630090, Novosibirsk, Russia;2. Novosibirsk National Research University, 2 Pirogov str., 630090, Novosibirsk, Russia;3. Novosibirsk State Technical University, 20 Marx aven., 630073, Novosibirsk, Russia
Abstract:A laser-scattering-based instrument was used to study an argon d.c. planar-diode glow discharge. The gas-kinetic temperature (Tg) was determined via Rayleigh scattering and the electron number density (ne), electron temperature (Te), and shape of the electron energy-distribution function were determined by Thomson scattering. Axial profiles of these parameters were obtained as the discharge current, voltage, and pressure were varied. Trends in the profiles of Tg and in the other parameters show the interdependence of these plasma species and properties. The results will be compared with current theoretical computer models in order to improve our understanding of the fundamental processes in glow discharges sustained under conditions appropriate for spectrochemical analysis.
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