Studies on atmospheric plasma abatement of PFCs |
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| Institution: | 1. Department of Chemical and Materials Engineering, Faculty of Engineering, The University of Auckland, Auckland, New Zealand;2. Middlemore Hospital, Private Bag 93311, Otahuhu, Auckland, New Zealand;1. Department of Chemical and Biomolecular Engineering, Yonsei University, 262 Seongsanno, Seodaemun-gu, Seoul 120-749, South Korea;2. Research Group for Nanocatalyst, Biorefinery Research Center, Korea Research Institute of Chemical Technology (KRICT), P.O. Box 107, Yusung, Daejeon 305-600, South Korea;3. Department of Chemistry, Sungkyunkwan University, Suwon 440-476, South Korea;1. Zhejiang University of Technology, College of Environment, HangZhou, 310014, China;2. School of Petrochemical Engineering & Environment, Zhejiang Ocean University, Zhoushan, 316004, China |
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| Abstract: | Microwave plasma at 2.45 GHz frequency operating at atmospheric pressure in synthetic gas mixtures containing N2, CF4, C2F6, CHF3, and SF6 were investigated experimentally for various gas mixture constituents and operating conditions, with respect to their ability to destroy perfluorocompounds. It was found that the destruction and removal efficiency (DRE) of the process is highly dependent on the total gas flow. DREs of up to 99.9% have been achieved using 1.8 kW of microwave power at 20 l/min total flow rate. |
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