刻蚀波导粗糙面散射的矩量法数值分析

用矩量法对刻蚀波导粗糙面的散射特性做出了精确的数值分析基于MonteCarlo方法建立高斯粗糙面数学模型,证明矩量法在分析刻蚀波导散射问题时,是可以应用于不同起伏高度、不同入射角的一种精确而高效的数值方法对不同起伏高度的两种偏振态,分别在小角度入射和大角度入射两种情况的随机散射特性应用矩量法做出了分析并以基于二氧化硅波导的EDG器件为例,分析了由于波导壁粗糙对于器件频谱响应特性的影响.

Analysis of the Scattering from an Etched Rough Surface Using a Moment Method

A numerical moment method is used to calculate and analyze the scattering from an etched rough surface of a slab waveguide. The rough surface is generated with a Monte Carlo method. It is shown that the present method is always effective and efficient for different standard deviations of Gaussian height distribution and different incident angles. The relation between the backscattering coefficients and the standard deviations of Gaussian height distribution is analyzed for both polarizations with small or large incident angle. The influence of the etched rough surface on the spectral response of an etched diffraction grating demultiplexer is considered as an example.