Synthesis of YBa2Cu3O7−x superconducting thin films on LaAlO3 by means of PAMOCVD |
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Authors: | H. Weyten G. Fransen R. Kemps A. Buekenhoudt J. Cornelis |
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Affiliation: | Materials Department, Flemish Institute for Technological Research (VITO), Boeretang 200, B-2400, Mol, Belgium |
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Abstract: | High-Tc superconducting thin films have been deposited in situ by means of a plasma assisted metal-organic chemical vapour deposition (PAMOCVD) process on LaAlO3. An EMCORE high-speed rotating disc reactor was used to deposit the films at a substrate temperature of 600°C to 800°C. The system is equipped with a (remote) 120 W microwave plasma generator. The oxidising plasma gas is N2O and/or O2 while Ar was used as the inert carrier gas for the different metal-organics. The influence of different process parameters (such as the temperatures of the metal-organics, substrate temperature, and plasma gas composition) on the superconductive properties and on the morphology of the films was investigated. Surface morphology and composition were studied by SEM/EDX or EPMA, and AC susceptibility measurements were used to investigate the superconductive properties (Tc and Jc). X-ray diffraction measurements indicated that single-phase YBa2Cu3O7−x films were epitaxially grown with the 00l orientation perpendicular to the substrate surface. The critical temperature (Tc) of the films is about 90 K and the critical current density (Jc) is higher than 106 A/cm2 at 77 K and zero field. |
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