| 基于误差递减修正法的非球面超精密加工 |
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| 引用本文： | 程颖,房丰洲,张效栋. 基于误差递减修正法的非球面超精密加工[J]. 光学技术, 2010, 36(1) |
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| 作者姓名： | 程颖 房丰洲 张效栋 |
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| 作者单位： | 天津大学,精密测试技术及仪器国家重点实验室,天津市微纳制造技术工程中心,天津大学,精密仪器与光电子工程学院,天津,300072 |
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| 基金项目： | 国家高技术研究发展计划(863)(2009AA044305);;国家博士后科学基金(20080440683) |
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| 摘 要： | 误差滤波和分离技术是超精密加工中的关键技术之一。采用误差递减法修正加工路径,利用修正的高斯权函数对测量表面进行滤波处理,设计并完成了整个误差递减系统,实现非球面的超精密车削加工,并在很大程度上提高其表面精度(P-V值)。通过实验验证,利用该加工方法,提高了加工效率,可明显地提高非球面的表面精度,最终达到面形精度小于200nm。
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| 关 键 词： | 非球面 超精密加工 车削 误差递减修正 |
Ultra-precision turning of aspheric mirrors using error-decreasing amendment method |
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| CHENG Ying,FANG Feng-zhou,ZHANG Xiao-dong. Ultra-precision turning of aspheric mirrors using error-decreasing amendment method[J]. Optical Technique, 2010, 36(1) |
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| Authors: | CHENG Ying FANG Feng-zhou ZHANG Xiao-dong |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology & Instruments;Centre of MicroNano Manufacturing Technology;Tianjin University;Tianjin 300072;China |
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| Abstract: | Error filtering and separating methods are the key technology in ultra-precision machining.Using error-decreasing method to amend the processing path,improving the Gaussian weight function to get better filtering effect,and designing a complete system to realize the machining process,all of which increase the form accuracy of aspheric mirror to a large extent.A large number of various non-spherical surfaces machined prove that the value of PV can be improved to be less than 200 nm. |
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| Keywords: | aspheric ultra-precision machining turning error decreasing amendment |
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