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Novolak-Diazochinon-Photoresiste: abbildende Systeme für den Computerchip |
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| Authors: | Arnost Reiser Hsiao-Yi Shih Tung-Feng Yeh Jian-Ping Huang |
| Abstract: | |
| Keywords: | Diazonaphthochinone Mikrolithographie Novolakresiste Perkolationstheorie Photographische Materialien |