| 金属有机分解法制备的SrTiO3薄膜的光学特性 |
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| 引用本文： | 马建华,孟祥建,孙璟兰,林铁,石富文,褚君浩.金属有机分解法制备的SrTiO3薄膜的光学特性[J].中国物理 B,2005,14(3):610-614. |
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| 作者姓名： | 马建华 孟祥建 孙璟兰 林铁 石富文 褚君浩 |
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| 作者单位： | National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200084, China; State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200085, China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200086, China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200087, China;National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200088, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant Nos 60221502 and 60223006) and Shanghai R&D Foundation for Applied Materials (Grant No 0316). |
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| 摘 要： | 采用金属有机分解法（MOD）在石英衬底上沉积了SrTiO3薄膜。所制备的薄膜是晶格常数为a=b=c=3.90?的多晶结构。通过测量190—1100nm波段内的透射光谱，采用包络方法计算了薄膜的光学常数（折射率n和消光系数k）。结果表明，采用MOD方法制备的薄膜的折射率大于采用射频磁控溅射、溶胶—凝胶和化学气相沉积方法制备的薄膜的折射率；薄膜的折射率色散关系满足单振子模型，其中振子强度S0为0.88′1014m-2，振子能量E0为6.40eV；薄膜的禁带宽度为3.68eV。
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| 关 键 词： | 光学特性 SrTiO3薄膜 金属有机分解 |
| 收稿时间： | 9/8/2004 12:00:00 AM |
Optical properties of SrTiO3 thin films prepared by metalorganic decomposition |
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| Ma Jian-Hu,Meng Xiang-Jian,Sun Jing-Lan,Lin Tie,Shi Fu-Wen and Chu Jun-Hao.Optical properties of SrTiO3 thin films prepared by metalorganic decomposition[J].Chinese Physics B,2005,14(3):610-614. |
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| Authors: | Ma Jian-Hu Meng Xiang-Jian Sun Jing-Lan Lin Tie Shi Fu-Wen and Chu Jun-Hao |
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| Abstract: | SrTiO3 thin films were deposited on vitreous silica substrates by metalorganic decomposition (MOD). The films are polycrystalline cubic in structure with the lattice constants of a=0.39nm. Their optical constants (refractive index n and extinction coefficient k) were calculated by the envelope method from the transmittance spectra in the wavelength range of 190nm to 1100nm. The refractive index of the present films is found to be higher than that of the other SrTiO3 films prepared by RF sputtering, sol—gel and chemical vapour deposition. The dispersion of the refractive index in the films follows the single electronic oscillator model with oscillator strength (S0) of 0.88×1014m-2 and oscillator energy (E0 |
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| Keywords: | optical properties SrTiO3 thin films metalorganic decomposition |
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