Evaluation of carbon films electrodeposited on different substrates from different organic solvents |
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Authors: | D Guo K Cai L-T Li Y Huang Z-L Gui |
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Institution: | (1) Department of Materials Science & Engineering, Tsinghua University, Beijing 100084, P.R. China, CN |
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Abstract: | Diamond-like-carbon (DLC) films have been deposited on Si, aluminum and indium tin oxide-coated glass from several organic
solvents with pulse-modulated power. The films are characterized by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.
XPS spectra show that the main composition of the films is carbon and Raman spectra show that the films are typical DLC films
and a high potential is preferable in the formation of sp
3-structure carbon. Comparing the results from different solvents and different substrates we deduce that the methyl group
of the solvents has a critical function in forming the DLC films. However, the formation process and the characters of the
films, such as appearance, resistivity and thickness, are mainly determined by the substrate. We may call this deposition
a substrate-controlled reaction.
Received: 31 May 2000 / Accepted: 9 January 2001 / Published online: 3 April 2001 |
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Keywords: | PACS: 68 55 Jk 81 15 Lm 82 80 Ch |
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