| 用于谐振式传感器的微型双层薄板热挠曲的研究 |
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| 引用本文： | 姚振华,朱长纯,程敏,刘君华.用于谐振式传感器的微型双层薄板热挠曲的研究[J].电子学报,2000,28(2):59-61. |
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| 作者姓名： | 姚振华 朱长纯 程敏 刘君华 |
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| 作者单位： | 西安交通大学真空微电子与微电子机械研究所,西安 710049 |
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| 基金项目： | 国家自然科学基金，博士点基金 |
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| 摘 要： | 本文对微机械中热胀系数不同的材料构成的双层复合薄板在均匀温升下的挠曲特性进行了研究,提出了在均匀温升下双层薄板热挠曲求解的能量法,并给出了小挠度下中心挠度与板厚的解析关系,为薄膜谐振式传感器温度特性的研究和新型温度传感器的设计与开发打下了基础.
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| 关 键 词： | 薄膜微机械 谐振式传感器 双层薄板 热挠曲 均匀温升 |
| 文章编号： | 0372-2112 (2000) 02-0059-03 |
| 收稿时间： | 1998-06-30 |
A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor |
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| YAO Zhen-hua,ZHU Chang-chun,CHENG Min,LIU Jun-hua.A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor[J].Acta Electronica Sinica,2000,28(2):59-61. |
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| Authors: | YAO Zhen-hua ZHU Chang-chun CHENG Min LIU Jun-hua |
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| Institution: | Vacuum Microelectronics and Micro-electro-mechanical System Institute,Xi'an Jiaotong University,Xi'an 710049,China |
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| Abstract: | We research on the thermal buckling characteristics of double layer membrane which is composed of different materials with different thermal expansion coefficiens under uniform temperature elevation.The energy method is proposed which is used to solve the problem and the symbolic relation between central buckling height and substrate height under small buckling height is also given.It is the primary theory of membrane resonant sensor,which makes the research and development of novel thermal sensor possible. |
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| Keywords: | membrane micro machine resonance sensor double layer membrance thermal buckling uniform temperature elevation |
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