Scaling laws for oxygen discharge plasmas |
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| Authors: | E. A. Bogdanov V. I. Kolobov A. A. Kudryavtsev L. D. Tsendin |
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| Affiliation: | (1) CFD Research Corporation, 215 Wynn Drive, Huntsville, AL, USA;(2) St. Petersburg State Technical University, Politekhnicheskaya ul. 29, St. Petersburg, 195251, Russia |
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| Abstract: | A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters—the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension. |
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