| 等离子体鞘层及粒子碰撞对微波共振探针诊断的影响 |
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| 引用本文： | 黄 勇,时家明,袁忠才,徐记伟.等离子体鞘层及粒子碰撞对微波共振探针诊断的影响[J].核聚变与等离子体物理,2010,30(1):86-89. |
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| 作者姓名： | 黄 勇 时家明 袁忠才 徐记伟 |
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| 作者单位： | (电子工程学院安徽省红外与低温等离子体重点实验室，合肥 230037) |
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| 摘 要： | 针对气压大于133Pa的气体放电时等离子体鞘层及粒子碰撞对微波共振探针密度测量的影响变大的问题，对微波共振探针模型进行了改进，推导了鞘层修正因子和碰撞修正因子，探讨了微波共振探针尺寸对测量等离子体密度的影响。结果表明，针丝半径选择0.2mm，并且选用较大宽度的探针有利于减小测量误差。
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| 关 键 词： | 微波共振探针 等离子体密度 鞘层 碰撞频率 修正因子 |
| 收稿时间： | 2009-03-02 |
The effect of plasma sheath and collision on microwave resonator probe diagnosing |
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| HUANG Yong,SHI Jia-ming,YUAN Zhong-cai,XU Ji-wei.The effect of plasma sheath and collision on microwave resonator probe diagnosing[J].Nuclear Fusion and Plasma Physics,2010,30(1):86-89. |
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| Authors: | HUANG Yong SHI Jia-ming YUAN Zhong-cai XU Ji-wei |
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| Institution: | (Key Lab of Infrared and Low Temperature Plasma of Anhui Province,Electronic Engineering Institute, Hefei 230037) |
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| Abstract: | The effects of plasma sheath and collisions become significant in the density measurement of gas discharges at pressures greater than 133Pa. The probe model correction is performed, and the plasma sheath and collision correction factors are deduced. The effect of probe dimentions on demsity measurement is esplosed. It reveals that choosing a proper larger probe width will be beneficial to minimizing the measure error, and the most favorable value of probe radius is 0.2mm. |
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| Keywords: | Microwave resonator probe Plasma density Sheath Collision frequency Correction factor |
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