Photonic crystal nanocavities in GaAs/AlGaAs with oxidised bottom cladding |
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Authors: | Karl Welna Maxime Hugues Christopher P Reardon Liam O’Faolain Mark Hopkinson Thomas F Krauss |
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Institution: | 1. Scottish Universities Physics Alliance (SUPA), School of Physics and Astronomy, University of St. Andrews, Fife KY16 9SS, United Kingdom;2. Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield S1 4JD, United Kingdom |
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Abstract: | We present a solution to the difficult task of removing an oxide-based hard mask from a photonic crystal fabricated in the GaAs/AlGaAs system. We use a polymer backfill technique to seal the AlGaAs layer, thereby making it inaccessible to the wet-etch solution. This allows us to use a GaAs active layer for the photonic crystal placed on an oxidised AlGaAs layer which provides mechanical and thermal support. Using this technique, we fabricated GaAs-based photonic crystal cavities and measured respectable quality factors (Q ≈ 2200) despite the intrinsic asymmetry of the system. The technique presents a viable method for producing electrically injected photonic crystal cavities for operation on a mechanically stable and thermally conducting buffer layer. |
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