The mesoscopic and microscopic structural consequences from decomposition and desorption of ultrathin oxide layers on Si(100) studied by scanning tunneling microscopy

The spatially inhomogeneous decomposition and desorption reaction of oxide layers with coverage 1-0.3 monolayers (ML) from a silicon (100) surface has been studied using scanning tunneling microscopy (STM). After desorption, microscopic changes to the (2 × 1) reconstruction produce two variations on the dimer row reconstruction with decreased surface atom density. A (2 × n) vacancy chain reconstruction and a c(4 × 4) incomplete row reconstruction were observed; a structure for the latter is proposed. Both reconstructions are metastable, reforming the (2 × 1) reconstruction upon heating. At greater length scales during desorption from an initial 1.0 ML coverage, the mesoscopic changes to the surface structure include pitting and roughening, with up to a measured 20 fold increase in the edge density as compared to the clean Si(100) surface.

These structural changes suggest a reaction mechanism involving a substantial rearrangement of the substrate silicon. From an initial 1.0 ML oxygen coverage, using measured void size distributions at total desorption levels of 13% and below — before voids have begun to coalesce — the evolution of void sizes during initial desorption can be followed. A mechanism for desorption is proposed in which silicon atoms must diffuse from adjacent clean surface area to the oxide boundary, producing a reactive complex from which SiO is desorbed. Void growth rates derived from two rate limiting cases for this desorption reaction mechanism can be compared to measured results. We show that the measured void area evolution is consistent with a reaction mechanism where the rate limiting step for monolayer desorption is the promotion of a silicon atom in a lattice site to a mobile monomer within the void.