Chemical composition and charge stability of highly crystalline pulsed-laser-deposited polytetrafluoroethylene films on metal substrates |
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| Authors: | N. Huber J. Heitz D. Bäuerle R. Schwödiauer S. Bauer H. Niino A. Yabe |
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| Affiliation: | (1) Applied Physics, Johannes-Kepler-University Linz, 4040 Linz, Austria, AT;(2) National Institute of Materials and Chemical Research (NIMC), Higashi 1–1, Tsukuba, Ibaraki 305, Japan, JP |
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| Abstract: | KrF excimer-laser ablation of sintered-powder polytetrafluoroethylene (PTFE) targets is used for the deposition of high-quality PTFE films on metallic microstructures and metal backplates for electroacoustic applications. The films are found to be highly crystalline, consisting of large spherulites with diameters up to 1 mm. X-ray photoelectron spectroscopy of the films revealed the chemical similarity of press-sinter target pulsed-laser-deposited films with bulk PTFE. Negatively charged PTFE films on stainless steel backplates exhibit an exceptional charge stability with practically no decrease of the surface potential up to 225 °C in open-circuit thermally stimulated discharge. Received: 20 December 2000 / Accepted: 20 December 2000 / Published online: 23 March 2001 |
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| Keywords: | PACS: 81.15.Fg 68.55.-a 77.55.+f |
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