超高反差体系的显影动力学研究

本文通过研究肼感染显影动力学,对肼感染显影的显影速度及其活化能进行测试和计算,籍以讨论有关肼感染显影过程的机理。实验结果表明:肼感染显影的早期是直接显影,活化能低;后期是灰化成核显影,活化能高;而低曝光量潜影核无灰化成核显影,活化能较高。高反差、短趾部的形成原因是由于显影加速和显影抑制的竞争结果。

STUDY ON THE DEVELOPMENT KINETICS OF SUPER HIGH CONTRAST SYSTEM

This paper deals with kinetics of hydrazine-promoted infectious development by meansof measurements and calculations of development rate and activation energy,mechanism isdiscussed at the same time. The experimental results are as follows:direct development withlow activation energy dominates early stage of development;the later stage is fogging nucleation with high activation energy;there is no development of fogging nucleation for low exposured latent nucleus,but with higher activation energy;the results of super high contrastand short toe are the competition between development acceleration and retardation.