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Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating
Authors:MA Jie  XIE Chang-Qing  LIU Ming  CHEN Bao-Qin  YE Tian-Chun
Affiliation:Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
Abstract:Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-raytransmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.
Keywords:07.85.Fv  42.25.Fx  41.50.+h
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