Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating |
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Authors: | MA Jie XIE Chang-Qing LIU Ming CHEN Bao-Qin YE Tian-Chun |
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Affiliation: | Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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Abstract: | Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-raytransmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult. |
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Keywords: | 07.85.Fv 42.25.Fx 41.50.+h |
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