| 晶粒尺寸对薄膜电阻率温度系数的影响 |
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| 引用本文： | 王晓平,赵特秀,季航,梁齐,董翊.晶粒尺寸对薄膜电阻率温度系数的影响[J].物理学报,1994,43(2):297-302. |
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| 作者姓名： | 王晓平 赵特秀 季航 梁齐 董翊 |
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| 作者单位： | 中国科学技术大学物理系 |
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| 摘 要： | 报道了Ｐｄ薄膜电阻率温度系数（ＴＣＲ）随不同薄膜厚度和不同退火温度的变化．实验结果表明：薄膜ＴＣＲ值远小于体材料的值，且对晶粒尺寸有一定的依赖关系；薄膜晶粒尺寸越大，其ＴＣＲ值也越大。采用晶粒间界散射的二流体模型对此结果进行了讨论。
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| 关 键 词： | 晶粒尺寸 薄膜 电阻率 温度系数 |
| 收稿时间： | 1993-04-15 |
EFFECT OF GRAIN SIZE ON TEMPERATURE COEFFICIENT OF RESISTIVITY OF Pd THIN FILMS |
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| WANG XIAO-PING,ZHAO TE-XIU,JI HANG,LIANG QI and DONG YI.EFFECT OF GRAIN SIZE ON TEMPERATURE COEFFICIENT OF RESISTIVITY OF Pd THIN FILMS[J].Acta Physica Sinica,1994,43(2):297-302. |
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| Authors: | WANG XIAO-PING ZHAO TE-XIU JI HANG LIANG QI and DONG YI |
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| Abstract: | The temperature coefficient of resistivity (TCR) of Pd thin film with different thicknesses and annealled at different tempertures has been investigated. The experi-mental results indicated that the TCR value of thin films is much smaller than that of bulk material and it also depcnds on grain size of the thin films. It was found that the TCR is higher for larger grain size. The result is explained readily by using the two-fluid model. |
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