Monolithic integration technique for microlens arrays with infrared focal plane arrays |
| |
| Institution: | 1. Optical Information Science Research Center (OISRC), Patna 800014, India;2. Department of Physics, Maulana Azad College of Engineering and Technology, Patna 801113, India |
| |
| Abstract: | Based on scalar diffraction theory, 8-phase-level 256×290 element diffractive microlens arrays with lenslet dimension of 50×33 μm2 have been fabricated on the back side of PtSi infrared focal plane arrays. The design and fabrication process are discussed. The measurement results indicate that the imaging quality has been greatly improved and the ratio of the signal-to-noise of the infrared focal plane array integration with microlens array is increased by a factor of 2.5. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
