计及溅射损失的平行板静电场法离子引出和收集

采用粒子模拟-Monte Carlo碰撞(particle in cell_Monte Carlo collision)方法研究了 原子蒸气激光同位素分离工程中一维平行板静电场法离子引出和收集过程，记录引出离子的 能量分布和角度分布，计算离子在收集板上造成的溅射损失.模拟结果表明，增加引出电压 可以缩短引出时间，降低碰撞损失，但是增加了溅射损失，使得收集率降低；增加电子温度 可以缩短引出时间，提高收集率；增加初始等离子体密度将使引出时间增加，收集率降低；而目标同位素丰度较高的情况下，离子引出过程的碰撞损失 关键词： 原子蒸气激光同位素分离 离子引出 溅射

Ion extraction and collection studied by parallel electrode method on considerin g sputtering loss

One-dimensional ion extraction and collection is studied by parallel electrode method using particle in cell_Monte Carlo collision (PIC-MCC) simulation. The e nergy and angle distribution of extracted ions is recorded and the sputtering lo ss is calculated. The results show that the extraction time and collision loss a re decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases. The extraction time is decreased and the collec tion ratio is increased by increasing electron temperature, while the extraction time is increased and the collection ratio is decreased by increasing initializ ed plasma density;and the collision loss is decreased and the collection ratio i s increased, if the target isotope concentration is higher. Improving the parall el electrode method leads to decreasing sputtering loss and increasing collectio n ratio greatly.