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Hydrogen vibrations on Si (111)
Authors:H. Wagner  R. Butz  U. Backes  D. Bruchmann
Affiliation:Institut für Grenzflächenforschung und Vakuumphysik, Kernforschungsanlage Jülich, D-5170 Jülich, Germany
Abstract:High resolution electron energy loss spectra are reported for atomic hydrogen and deuterium adsorption on the Si (111) 7x7 surface. The experiments were carried out for various hydrogen exposures and different substrate temperatures. Clear evidence is given for the formation of SiH2 and/or SiH3 complexes in the early stages of adsorption. Strong indications are also obtained for the removal of adsorbed hydrogen probably via the formation and desorption of silane during hydrogen exposure.
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