| 金属表面微纳米光滑构造的新方法 |
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| 引用本文： | 张洋,朱新利,廖志敏,俞大鹏.金属表面微纳米光滑构造的新方法[J].电子显微学报,2009,28(6):511-516. |
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| 作者姓名： | 张洋 朱新利 廖志敏 俞大鹏 |
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| 作者单位： | 北京大学物理学院,介观物理国家重点实验室,电子显微镜实验室,北京100871 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 传统的曝光技术等平面工艺通常只能获得边缘陡峭的平面结构。通过多层曝光、灰度曝光、聚焦离子束加工等方法可以实现高度渐变的准三维结构的构造,却往往难以获得良好的光滑度。本文结合电子束曝光技术、PMMA结构平滑技术、模板剥离技术,实现了多种多样的渐变结构的构造。这种技术具有构造方法简单、表面粗糙度小、可自由定位等众多优点。
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| 关 键 词： | 光滑结构 金属 电子束曝光 模板剥离法 |
Novel route to fabrication of micro-/nano-sloped patterns on metal |
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| ZHANG Yang,ZHU Xin-li,LIAO Zhi-min,YU Da-peng.Novel route to fabrication of micro-/nano-sloped patterns on metal[J].Journal of Chinese Electron Microscopy Society,2009,28(6):511-516. |
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| Authors: | ZHANG Yang ZHU Xin-li LIAO Zhi-min YU Da-peng |
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| Institution: | ZHANG Yang,ZHU Xin-li,LIAO Zhi-min,YU Da-peng(State Kay Laboratory for Mesoscopic Physics,and Electron Microscopy Laboratory,Department of Physics,Peking University,Beijing 100871,China) |
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| Abstract: | Only planar pattern with sharp edges can be fabricated by traditional lithography methods.Quasi-3D structures with gradually changed altitude can be obtained by means of multi-layer lithography,gray-scale photolithography and focused ion beam mining.However,desirable surface smoothness can hardly be achieved.Combining electron beam lithography,PMMA smoothing technique and template stripping method,the fabrication of diverse sloped metal patterns were realized.The method promises easy fabrication of high-qua... |
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| Keywords: | sloped metal pattem electron beam lithography template-stripping method |
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