| 与消光式兼容的光度椭偏仪的原理 |
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| 引用本文： | 吴启宏. 与消光式兼容的光度椭偏仪的原理[J]. 光学学报, 1987, 0(7) |
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| 作者姓名： | 吴启宏 |
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| 作者单位： | 浙江大学光仪系 |
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| 摘 要： | 在PQSA式消光型椭偏仪基础上,把原来方位固定的1/4波片改为旋转波片就可以构成与消光式兼容的新型光度椭偏仪。本文讨论了这种光度椭偏仪的工作原理和计算公式。理论分析指出,这是一种完全的椭偏仪,能唯一地确定的符号,并在测量线偏光的时精度不会下降。文中还报告了进行原理性实验的结果。
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| 关 键 词： | 椭偏术 |
Principle of a photometric ellipsometer compatible with null ellipsometer |
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| Wu QIHONG. Principle of a photometric ellipsometer compatible with null ellipsometer[J]. Acta Optica Sinica, 1987, 0(7) |
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| Authors: | Wu QIHONG |
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| Abstract: | A new-type photometric ellipsometer was built. Based on PQSA null ellipsometer., the compatible photometric ellipsometer replaces the fixed compensator by a rotating quarterwave plate. The principle is dissoussed in detail. It is a complete ellipsometer, which can determine the sign of A unambiguously, and it has the same sensitivity for the A even with linear polarized light. Experimental results are also reported. |
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| Keywords: | Ellipsometry. |
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