New volatile strontium and barium imidazolate complexes for the deposition of group 2 metal oxides |
| |
| Authors: | Norman John A T Perez Melanie Kim M S Lei Xinjian Ivanov Sergei Derecskei-Kovacs Agnes Matz Laura Buchanan Iain Rheingold Arnold L |
| |
| Affiliation: | Air Products and Chemicals, 1969 Palomar Oaks Way, Carlsbad, California 92011, USA. normanja@airproducts.com |
| |
| Abstract: | We report the synthesis, characterization, and experimental density function theory-derived properties of new volatile strontium and barium imidazolate complexes, which under atomic layer deposition conditions using ozone as a reagent can deposit crystalline strontium oxide at 375 °C. |
| |
| Keywords: | |
| 本文献已被 PubMed 等数据库收录！ |
|
