| 氧化锌/金刚石薄膜异质结紫外光探测器 |
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| 引用本文： | 黄健,王林军,唐可,张继军,夏义本,鲁雄刚. 氧化锌/金刚石薄膜异质结紫外光探测器[J]. 发光学报, 2011, 32(3): 272-276. DOI: 10.3788/fgxb20113203.0272 |
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| 作者姓名： | 黄健 王林军 唐可 张继军 夏义本 鲁雄刚 |
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| 作者单位： | 上海大学,材料科学与工程学院,上海,200072 |
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| 基金项目： | 国家自然科学基金(60877017); 长江学者和创新团队发展计划(IRT0739); 上海市重点学科资助课题(S30107); 上海市教育委员会优秀青年教师基金(shu09007);上海市教育委员会科研创新项目(08YZ04)资助 |
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| 摘 要： | 采用射频磁控溅射法在p型自支撑金刚石衬底上制备了高度c轴取向的n型氧化锌薄膜.研究了不同的溅射功率对氧化锌薄膜质量的影响.通过半导体特性分析系统测试了氧化锌/金刚石异质结的电流-电压特性,结果显示该异质结二极管具有良好的整流特性,开启电压约为1.6 V.在此基础上制备了结型紫外光探测器,并对其光电性能进行了研究.结果表...
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| 关 键 词： | 自支撑金刚石 氧化锌 探测器 异质结 |
Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode |
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| HUANG Jian,WANG Lin-jun,TANG Ke,ZHANG Ji-jun,XIA Yi-ben,LU Xiong-gang. Ultraviolet Detector Based on ZnO/Diamond Film Heterojunction Diode[J]. Chinese Journal of Luminescence, 2011, 32(3): 272-276. DOI: 10.3788/fgxb20113203.0272 |
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| Authors: | HUANG Jian WANG Lin-jun TANG Ke ZHANG Ji-jun XIA Yi-ben LU Xiong-gang |
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| Affiliation: | HUANG Jian,WANG Lin-jun,TANG Ke,ZHANG Ji-jun,XIA Yi-ben,LU Xiong-gang(School of Materials Science and Engineering,Shanghai University,Shanghai 200072,China) |
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| Abstract: | Highly c-axis oriented n-type ZnO films were grown on the p-type fresstanding diamond(FSD) substrates by radio-frequency(RF) magnetron sputtering method.The effects of the sputtering power on the pro-perties of ZnO films were studied.Current-voltage(I-V) characteristics of the ZnO/diamond heterojunction were examined by a semiconductor characterization system and the results showed a distinct rectifying characteristics with a turn-on voltage of about 1.6 V.The ZnO/diamond heterojunction diode was also used ... |
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| Keywords: | freestanding diamond ZnO detector heterojunction |
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