| DLC/Ag/DLC复合多层薄膜光学性能 |
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| 引用本文： | 张德恒,徐照方,李伯勋.DLC/Ag/DLC复合多层薄膜光学性能[J].光学学报,2008,28(10):2031-2035. |
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| 作者姓名： | 张德恒 徐照方 李伯勋 |
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| 作者单位： | 1. 上海摩根碳制品有限公司,上海,200241
2. 中南大学,物理科学与技术学院,湖南,长沙,410083 |
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| 摘 要： | 采用等离子体增强化学气相沉积类金刚石(DLC)薄膜、高真空磁控溅射镀膜设备溅射Ag靶的方法制备了不同厚度Ag、DLC层的DLC/Ag/DLC多层膜,分别用紫外可见分光光度计、四探针测试仪对样品的光学性能、电学性能进行了测试.结果表明,随着Ag层厚度的增加,DLC/Ag/DLC多层膜透射率先增后减,外层DLC薄膜和内层DLC薄膜对透射率影响基本一致,随着厚度增加透射率先增后减,在内外层厚度为40 nm,Ag夹层厚度为16 nm时,DLC(30 nm)/Ag(16 nm)/DLC(40 nm)膜在550 nm处的透射率高达94.4%,电气指数高达112.4 ×10-3Ω-1,远远超过现有透明导电膜的电气指数(FTC≈20×10-3Ω-1).
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| 关 键 词： | 薄膜光学 光学性能 多层膜 光学透射率 电气指数 磁控溅射 |
| 收稿时间： | 2008/1/4 |
Studay on Optical Property of DLC/Ag/DLC Multilayer Films |
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| Zhang Deheng,Xu Zhaofang,Li Boxun.Studay on Optical Property of DLC/Ag/DLC Multilayer Films[J].Acta Optica Sinica,2008,28(10):2031-2035. |
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| Authors: | Zhang Deheng Xu Zhaofang Li Boxun |
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| Institution: | Zhang Deheng1 Xu Zhaofang2 Li Boxun21Shanghai Morgan Carbon Co.Ltd.,Shanghai 200241,China2School of Physics Science , Technology,Central South University,Changsha,Hunan 410083,China |
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| Abstract: | DLC/Ag/DLC multilayer films with different Ag and DLC thickness were prepared with high-vacuum magnetron sputtering.DLC layers were prepared by plasma enhanced chemical vaporation deposition method.The optical and electrical properties of samples were studied with a UV-vis pectrophotometer and a four-point probe,respectively.The results indicate that with the increase of the thickness of the Ag layer,the transmittance firstly increases and then decreases.With the increase of the thickness of the inner or ou... |
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| Keywords: | thin film optics optical properties multilayer films optical transmittance electrical index magnetron sputtering |
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