| 刻蚀设备在太阳能晶硅电池刻蚀工艺中的应用 |
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| 引用本文： | 杨金,郭进,魏唯,万喜新,李佳.刻蚀设备在太阳能晶硅电池刻蚀工艺中的应用[J].电子工业专用设备,2013(8):26-29. |
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| 作者姓名： | 杨金 郭进 魏唯 万喜新 李佳 |
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| 作者单位： | [1]中国电子科技科技集团公司第四十八研究所；湖南长沙410111 [2]湖南红太阳光电科技有限公司,湖南长沙410205 [3]国家光伏装备技术工程研究中心,湖南长沙410205 |
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| 摘 要： | 介绍了激光划线设备在太阳能电池中的应用。与传统等离子体刻蚀设备对比,从设备结构,工艺原理,试验测试等方面做了深入的分析,并从理论角度分析得出激光刻蚀具备效率损失小,能够提高电池片的转换效率的优点,同时用实验验证了激光划片设备具有优异的刻蚀效果,对提升电池片效率的贡献。
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| 关 键 词： | 激光刻蚀 等离子体刻蚀 太阳能 硅片电池 |
The Application and Study of Etching Device for the Solar Silicon Cell Etching Technology |
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| YANG Jin,GUO Jin,＇Z,WEI Wei,WAN Xixin,LI Jia.The Application and Study of Etching Device for the Solar Silicon Cell Etching Technology[J].Equipment for Electronic Products Marufacturing,2013(8):26-29. |
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| Authors: | YANG Jin GUO Jin ＇Z WEI Wei WAN Xixin LI Jia |
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| Institution: | ＇3 (1 .The 48th Research Institute of CETC, Changsha 410111, china; 2.Hunan Red Solar Photoelectricity Science and Technology CO. Ltd., Changsha, 410205, China; 3.National Solar Equipment Technology Engineering Research Center, Changsha 410205, China) |
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| Abstract: | The passage introduces the application of the laser etching device to the solar SlhCOn ceils. Contrast to the traditional plasma etching device, the passage analysis deeply the structure of machine, the principle of technology, and the result of the silicon cells testing. The laser etching device applied to the silicon cells have the advantages in theory that the silicon cells can avoid to waste the efficiency and enhance the whole transitional efficiency of the solar silicon cell. At the same time, with lots of experiences we make sure the laser device have the excellent etching performance and contribute to enhance the efficiency of the cells. |
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| Keywords: | Laser etch Plasma etch Solar Silicon cell |
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