Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy |
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| Authors: | G Kragler H Bender G Willeke E Bucher J Vanhellemont |
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| Institution: | (1) Faculty of Physics, Universität of Konstanz, M 500, P.O. Box 5560, D-78434 Konstanz, Germany;(2) IMEC, Kapeldreef 75, B-3001 Leuven, Belgium |
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| Abstract: | The structural and compositional properties of undoped SIPOS thin films have been studied by spectroscopic ellipsometry and transmission electron microscopy. It is shown that in most cases the former method provides fast and reliable results. The growth rate and crystallinity of SIPOS layers are studied as a function of N2O concentration in the gas phase and annealing temperature. |
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| Keywords: | 07 65 07 80 68 55 |
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